patents

1. 1. Multilayer Reflector, Method of Manufacturing a Multilayer Reflector and Lithographic Apparatus
   Amirmehdi (Mehdi) Saedi, Joost FRENKEN, Cristina SFILIGOJ, Jan VERHOEVEN
   
2. 2. A processing chamber comprising a device for sample characterization during process
   Gertjan van Baarle, Irene Groot, Amirmehdi (Mehdi) Saedi, Arthur Sjardin , Marc de Voogd